Thermal Model for Excimer Laser Micromachining
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Thermal model for excimer laser micromachining

 

APPENDIX A 

 

THERMAL MODEL

 

The finite-difference thermal model developed to investigate heating/ablation during irradiation with nanosecond duration laser pulses is presented. This model was used to investigate the heating behaviour of Al2O3, TiC and Al2O3-TiC by considering the fraction of the individual phases in the composite. It allowed to study the influence on heating of various material properties, namely the optical absorption coefficient and thermal conductivity.

 

A.1 INTRODUCTION

 

Most laser applications for materials processing purposes are based on the thermal action of laser radiation, causing changes in composition, structure, and properties of the material or leading to its ablation. The modification and ablation of solids under the effect of laser radiation proceed through phase transformations whose progress is governed mainly by heat and mass transfer processes. The physical and mathematical models of such processes are frequently constructed on the basis of the heat conduction and diffusion theory.

For the macroscopic heat conduction theory to be applicable, it is necessary that the system is in a state of local equilibrium, which in condensed media takes a time of about  to be established [1]. If the duration t of the processes one is interested in is , then the system may be described in statistical terms, in order to determine the average velocity, density, and energy of particles; that is, the notions of temperature, phase, and other thermodynamic parameters may be used [1]. The classical heat conduction theory postulates the validity of the Fourier heat transfer law and uses the parabolic differential equation [2]

(A.1.1)

 

where G is the heat source. If heat propagates in the direction z only, and the thermophysical constants Cp, K and r are independent of the temperature, equation (A.1.1) assumes the form

 

(A.1.2)

Equations (A.1.1) and (A.1.2) presume an infinite propagation velocity v* of thermal perturbations. When the intensity of the heat source is high, the finiteness of v* may be important for fast processes, and the differential heat transfer equation will then have the form [2]

 

(A.1.3)

 

In this expression,  is the thermal diffusivity and  is the relaxation time, which ranges between 10-11 and 10-12 s in metals, and between 10-10 and 10-11 s in porous solids. Therefore, if the characteristic time of laser-induced processes exceeds about 10-9 s, the traditional equations (A.1.1) and (A.1.2) can be used, and the analysis of the absorption of laser energy and its transfer to the lattice can be made by considering a laser heat source and uniform condensed phase temperature. Under these conditions the electromagnetic energy from the laser light can be viewed as being instantaneously converted into heat at the location of absorption.

The modelling of heat transfer in the substrate irradiated by a laser pulse of short duration is typically performed using the Fourier heat diffusion model. Instead of this model, the hyperbolic heat equation [3], the vibrational cooling model [4,5], and the equation of phonon radiative transfer [6] based on Boltzmann transport theory have been developed.

 

A.2 ONE-DIMENSIONAL MODEL

 

A finite-difference model was developed to study heating upon irradiation with nanosecond duration pulses at excimer laser wavelengths. The model is based on the work developed by Wagner [3]. Since the cross section of the incident laser beam (frequently above 50 mm) is significantly larger than the typical optical penetration depth (<2 mm), a one-dimensional approach may be applied to the situation under study. The one-dimensional model was applied to Al2O3, TiC and a hypothetical material whose properties were estimated considering the weight fraction of Al2O3 and TiC in the Al2O3-TiC composite. The target is divided in several elements, and heating of any element is accomplished by bulk absorption of laser energy that has been transmitted through elements near the surface. The transient temperature behaviour of each element in a slab is calculated by considering its specific heat and conduction to neighbouring elements. In a first approximation heating is supposed to occur at atmospheric pressure, and temperatures above the vaporisation temperature are not supported. At the vaporisation temperature, an element absorbs the latent heat (which is supplied by the laser energy) at constant temperature and pressure.

It is assumed that the material is irradiated with a laser beam of uniform power density I0(t) (W/cm2), and has an absorption coefficient a such that the intensity I(z,t) (W/cm2) at any depth z from the surface of the material is given by I(z,t)=(1-R)I0(t)exp-az, where R is the surface reflectivity. Under these conditions, the absorption of laser energy is equivalent to heating the material with a non-uniform heat source w(z,t) (W/cm3), where w(z,t)=-dI(z,t)/dz=(1-R) I0(t)aexp-az. The temporal variation of laser intensity I0(t) is approximated by considering a triangular pulse with a duration at its base of tl = 60 ns, and peak intensity at tp = 10 ns, in agreement with the behaviour of standard nanosecond excimer lasers, resulting

 

(A.2.1)

 

For the purposes of numerical analysis the material is divided into n nodes of width d. Each node undergoes the following heating process: 1) It absorbs heat at constant specific heat Cp until it reaches the melting temperature Tm. 2) Then, absorbs heat at constant temperature until it has absorbed the heat of fusion Hf. 3) It is again heated at constant specific heat to the vaporisation temperature. 4) Finally, it absorbs the latent heat of vaporisation Hv at constant temperature and is vaporised. From an energy balance on the ith node the temperature rise DTi of that node during the time Dt can be found

 

(A.2.2)

 

where Qi (J/cm2) is the heat input to the ith node. The heat input Qi depends upon the heat-source strength w(zi, t) and upon conduction from adjacent nodes

 

(A.2.3)

 

where K is the thermal conductivity and zi=(i-1)d. Combining equations (A.2.2) and (A.2.3) gives a result which allows numerical calculation of the transient temperature behaviour in the ith node:

 

(A.2.4)

 

When a node reaches the melting temperature it absorbs the heat of fusion at constant temperature. The technique to handle this situation numerically is to define an auxiliary variable Pi. When the ith node reaches the melting temperature, Pi accumulates the calculated value of the heat input CpDTi for enough iterations to account for the heat of fusion Hf. When  during melting, the accumulation process is complete and the node is again heated according to equation (A.2.4). If a node reaches the vaporisation temperature it must absorb the heat of vaporisation Hv, and the accumulation process is resumed. Whenever Pi=Hv+Hf, the node vaporises and vanishes. Then a new surface exists on the slab and the definition of zi must be revised. If a total of m surface nodes have been vaporised then zi=(i-1-m)d. The computation of CpDT for the first and last nodes is slightly different, since conduction can occur to only one node, modifying equation (A.2.4) as follows

 

, for i = m+1

 

, for i = m+1, m+1, ..., n-1

 

, for i = n

(A.2.5)

 

 

 

 

 

 

In summary, equation (A.2.5) is used in conjunction with the auxiliary variable Pi to calculate the transient temperature behaviour of the material irradiated by the laser beam. The dependence on temperature of the thermal properties is considered by using a linear interpolation of the values shown in Table A.2.1. The variation with temperature of the optical properties is not expected to be significant with for UV wavelengths [4], and it is not considered. The calculations were performed considering the width d of the individuals nodes as 10 and 1 nm. For convergence to be achieved, these values require that the temperature along the depth of the material is calculated every ~10-11 and 10-13 s, respectively. Since these different time intervals did not lead to significant variation on the results, most calculations were performed considering a 10 nm node width, in order to minimise the computing time for a pulse duration of about 60´10-9 s. 

In order to consider temperatures in the material above the vaporisation temperature at atmospheric pressure, the Clausius-Clapeyron equation was used and the pressure and temperature in the plume estimated as shown in Appendix B. A two-dimensional finite-difference model was also developed, and consists in an extension of the simpler one-dimensional version. This model allowed to consider TiC grains in an Al2O3 matrix, and the influence of the surface topography on heating.

 

 

 

 

Table A.2.1a: Parameters used in numeric calculations. Properties of Al2O3 and TiC collected from CRC Handbook of Chemistry and Physics [5], TAPP [6] where not indicated otherwise.

Parameters

Al2O3

TiC

 

Melting temperature Tm (K)

2345

3413

 

Vaporisation temperature Tv (K)

3803

5093

 

Heat of fusion Hf (kJ/kg)

1.06´103

1.4´103

 

Heat of vaporisation Hv (kJ/kg)

1.82´103

2.13´103

 

 

Reflectivity R (at l=248 nm, normal incidence)

0.092[4]

0.4[7]

 

Absorption Coefficient a (cm-1 at 248 nm)

4´104[8]

1.14´106[7]

 

 

Table A.2.2b: Temperature dependence of physical properties [6].

Temperature dependent properties for TiC

 

298 K

1819 K

3300 K

liquid

Specific heat Cp (J/kg.K)

563

960

1230

1048

Density of mass r (kg/m3)

4930

4804

4682

4400

Thermal conductivity K (W/mK) [9]

9

40

50

50

Temperature dependent properties for Alumina

 

298 K

1312 K

2327 K

liquid

Specific heat Cp (J/kg.K)

774

1275

1363

1888

Density of mass r (kg/m3)

3990

3924

3860

3200

Thermal conductivity K (W/mK) [9]

36

6

5

5

 


REFERENCES

 

1. E. N. Sobol: Phase Transformations and Ablation in Laser-Treated Solids, (John Wiley & Sons, New York 1995)

2. H. S. Carslaw and J. C. Jaeger: Conduction of heat in solids, (Oxford University Press, Oxford 1959)

3. R. E. Wagner: Laser drilling mechanics, J. Appl. Phys. 45 (10), 4631-4637 (1974)

4. W. W. Duley: UV lasers: Effects and Applications in Materials Science, (Cambridge University Press, 1996)

5. D. R. Lide: CRC Handbook of Chemistry and Physics, (CRC Press, 1996)

6. TAPP: Thermochemical and Physical Properties (ES Microware, 1991)

7. J. Pflüger and J. Fink: In Handbook of Optical Constants of Solids II (Academic Press, 1991), pp. 303-311

8. V. N. Tokarev, W. Marine, C. Prat, and M. Sentis: Clean processing of polymers and smoothing of ceramics by pulsed laser melting, J. Appl. Phys. 77 (9), 4714-4723 (1995)

9. M. V. Swain: Structure and properties of ceramics, R.W. Cahn, P. Haasen, and E.J. Kramer (VCH, New York 1994)

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